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Chain oxygen to PSG alkali throwing automation

This equipment automation is mainly used in battery factories, docking chain oxygen process machines, automatic feeding automatic production lines; and PSG quality inspection buffer machine, which can cache the number of chain oxygen silicon wafers; discharging silicon wafers from PGS and loading them into flower baskets. The flower basket is moved to the alkali polishing process machine; the alkali throwing material will place the flower basket vertically in the material channel, docking with AGV trolley and docking signal processing
  • Equipment function
  • Device parameters
  • Series products

Equipment function

This equipment automation is mainly used in battery factories, docking chain oxygen process machines, automatic feeding automatic production lines; and PSG quality inspection buffer machine, which can cache the number of chain oxygen silicon wafers; discharging silicon wafers from PGS and loading them into flower baskets. The flower basket is moved to the alkali polishing process machine; the alkali throwing material will place the flower basket vertically in the material channel, docking with AGV trolley and docking signal processing

Device parameters

Project Parameters Remarks
Wafer specifications 210*210mm Compatible with 180*180mm-230*230mm
Wafer thickness 150-220um  
Capacity ≥9000 pcs/hour  
Loading and unloading flower baskets The loading is equipped with a flipper, which can be turned on or blocked by yourself The blanking configuration has a receiving buffer, and the input buffer must not generate fragments
Fragmentation rate ≤0.02% Calculated for 1 month (1% includes maintenance, abnormal shutdown, fluid change)
Boot rate ≥99%
Other It is suitable for chain 8-channel equipment (210), and there is an accessible personnel operating space between the PSG blanking and the alkali throwing robot

PS: This mechanism includes chain oxygen feeding + chain oxygen post buffering + PSG unloading + alkali throwing robot feeding + alkali throwing and unloading vertical machine, the number of buffers is not less than the number of silicon wafers in the chain oxygen machine, flower basket buffering The quantity is not less than 5+2;

National Service Phone:0512-66380672 Tel:0512-66380672 Add:3939 Puzhuang Avenue, Wuzhong District, Suzhou City

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